JPH0455749U - - Google Patents

Info

Publication number
JPH0455749U
JPH0455749U JP9760790U JP9760790U JPH0455749U JP H0455749 U JPH0455749 U JP H0455749U JP 9760790 U JP9760790 U JP 9760790U JP 9760790 U JP9760790 U JP 9760790U JP H0455749 U JPH0455749 U JP H0455749U
Authority
JP
Japan
Prior art keywords
ion
ionization chamber
ion source
exit port
injection gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9760790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9760790U priority Critical patent/JPH0455749U/ja
Publication of JPH0455749U publication Critical patent/JPH0455749U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP9760790U 1990-09-19 1990-09-19 Pending JPH0455749U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9760790U JPH0455749U (en]) 1990-09-19 1990-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9760790U JPH0455749U (en]) 1990-09-19 1990-09-19

Publications (1)

Publication Number Publication Date
JPH0455749U true JPH0455749U (en]) 1992-05-13

Family

ID=31838120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9760790U Pending JPH0455749U (en]) 1990-09-19 1990-09-19

Country Status (1)

Country Link
JP (1) JPH0455749U (en])

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